The Compound Semiconductor Technology Roadmap Embedded in the 2003 ITRS: Implications for the MANTecH Community

Herbert S. Bennett¹, Julio Costa², Anthony A. Immorlica, Jr., ³, and Charles E. Weitzel⁴

¹National Institute of Standards and Technology, 100 Burear Drive, Gaithersburg, MD 20899-8120, email: herbert.bennett@nist.gov, Tel: +1-301-975-2070
²RF Micro Devices, Greensboro, NC 27409
³BAE Systems, Nashua, NH 03061
⁴Freescale Semiconductor, Tempe, AZ 85284

Wireless applications have grown quickly to become significant markets for compound semiconductor device manufacturers. As a result, the 2003 ITRS recognizes wireless applications enabled by RF and analog/missed-signal (AMS) devices as a separate new system and technology driver. A technology roadmap for RF and AMS applications of compound semiconductors now exits in the 2003 International Technology Roadmap for Semiconductors (ITRS). Past ITRS roadmaps focused on mainstream CMOS and BiCOMS processes and applications. For the first time, the current 2003 ITRS Roadmap includes III-V compound semiconductors in the context of CMOS technology nodes. We present selected highlights from the 2003 ITRS that concern compound semiconductor MANufacturing TecHnology community.

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