Uniform InP/InGaAs SHBT Fabrication Using ICP emitter Etching on 4-inch Wafers
Sangmin Lee, Javier Fierro, Sonja Nedeljkovic, Amal Weththasingha, Nguyen Nguyen and Chanh Nguyen
Global Communikcation Semiconductors, Inc
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Keywords: InP/InGaAs HBT, ICP etch, SHBT device, uniformity, manufacturability
In this paper, we report manufacturable InP/InGaAs HBT fabrication technology using Cl2 based Inductively coupled plasma etching (ICO) for Emitter mesa formation. For comparison, we also fabricated devices with wet etched Emitter mesa, which is so far GCS’s base line HBT process. Dry etched Emitter devices show better uniformity, lower Emitter resistance, higher ft and comparable Emitter Base junction leakage current. The Emitter mesa undercut from SEM pictures was about half of wet etched emitter. This process will lead us to a reliable and reproducible InP HBT process with extreme lateral scaling of devices for ultra high speed ec fabrication.