Very Large Scale Electro-optical Device Process and Yield Challenges
Aviram Feingold, Daniel Majer, Arnon Arbel, Andrey Grinman, Marc Altman, Jeff Levy, Eyal Shekel
Chiaro Networks LTD,
Keywords: GaAs, waveguide, yield, switching time, stress, Te/TM ratio
We report on the fabrication of a high yield very large-scale elecgtro-optical GaAs-AlGaAs waveguide device, consisting of 18 beam deflectors with 128 waveguides in each deflector. The waveguides and n-type ohmic contacts are connected via 2508 bumps to a ceramic carrier, using flip chip technology. The carrier is also used as an optical bench for the optical components.