Metal particle
effects on thin film capacitors in high volume manufacturing
Muralidhar R. Rao,
Sheila T. O'Neil, Shiban Tiku
Skyworks Solutions
Inc.,
muralidhar.rao@skyworksinc.com,
805 480 4556, sheila.oneil@skyworksinc.com, 805 480 4376
shiban.tiku@skyworksinc.com, 805 480 4302
Keywords: Thin film capacitors, particles, microwave
integrated circuits, power amplifiers, breakdown voltage
Abstract
The effect of metal
particles on thin film dielectric capacitors is characterized. Electrical
characteristics of statistically significant numbers of capacitors are
measured. A figure of merit is derived from the cumulative distribution of
capacitor burnout voltages. The figure of merit is correlated with the number
of particles per wafer. The use of the figure of merit in establishing process
consistency and reproducibility is demonstrated.