MIM’s the Word –
Capacitors for Fun and Profit
Martin J. Brophy,
Alfredo Torrejon, Shawn Petersen, Kamal Avala, and Li Liu
TriQuint
Semiconductor,
Abstract
Capacitor properties were
studied using a special test mask. We derived improved measurement and test
capacitor and cell design. We saw a small perimeter scaling as well as the
usual area scaling. Time dependent dielectric breakdown was extensively studied.
We determined that the 4V/sec breakdown voltage is a sound figure of merit for
that, and that nitride deposition conditions can be tuned for better TDDB
performance, important for medium voltage applications. Capacitor nitrides as
thin as 25 nm were seen to be feasible.