P A P E R    T I T L E Preparing Polished Cross Sections Of III-V Devices For The SEM A U T H O R  /  C R E D I T S Heinz Nentwich and Lawrence Hobbs Nortel Networks, 3500 Carling Avenue Nepean, Ontario    Canada, K2H 8E9 nentwich@nortelnetworks.com, lhh@nortelnetworks.com Phone: (613) 763-2180, Fax: (613) 763-2404 A B S T R A C T We describe a two-angle sample preparation technique, working with samples up to 3 mm wide, using low pressure, and a non-aqueous lubricant. Delineation etches have been used to remove polishing damage and increase contrast in the SEM. The technique has been validated through the preparation of hundreds of samples and comparison with sections made using a focused ion beam.