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1999
2001

The International Conference on
Compound Semiconductor Manufacturing Technology

P A P E R    T I T L E
An Efficient On-Wafer Production Test System for MMW Power MMICs with Diagnostic Flag Capability

A U T H O R  /  C R E D I T S
R.G. Freitag, K.M. Renaldo, J.G. Burns and H.G. Henry
Northrop Grumman Corporation
Electronic Sensors and Systems Sector, Baltimore, MD.

A B S T R A C T
An on-wafer production test system has been developed which provides 100% dc and rf screening of millimeter-wave power MMICs to customer specifications. The test software is modular making it easily adaptable to unique customer requirements and is attached to a linked database for rapid data analysis and chip delivery. A principal feature of the system is its sophisticated network of failure flags which are used to highlight potential processing/design problems. The flags are linked to a series of diagnostic tests performed on every MMIC in addition to the usual rf measurements such as power output, gain and drain/gate current. The diagnostic tests screen out non-compliant MMICs before RF test thereby minimizing test time. Pareto analyses will be presented showing the utility of the flags in diagnosing specific processing problems.

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