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The International Conference on
Compound Semiconductor Manufacturing Technology
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P A P E R T I T L E
Optimized Planning and Operation of High Volume GaAs Epi-Wafer Manufacturing Facility
A U T H O R / C R E D I T S
M. E. Lin, G. Koley*, W. Liu and D. Biswas
Alpha Industries, Inc., Woburn, MA 01801
*Department of Electrical Engineering, University of Massachusetts, Lowell, MA
A B S T R A C T
The markets based on the RF devices with low noise, high power, high efficiency and working at high frequency are growing and expanding very quickly. In fact the market experienced a phenomenal growth rate of 200-300% in 1997-1998. The increasing epi-wafer demand drives manufacturers to build high volume (more than 20,000 wafers/year in the facility) Molecular Beam Epitaxy (MBE) production systems with low cost and high device performance. Alpha Industries, one of the leading players in this market with in-house volume production capability, has, over the years, developed a most pertinent organizational structure which involves a constant interaction of a production group and an engineering group with an aim towards the optimization of the high volume production. In this paper we discuss the different manufacturing and operational aspects of the structure to ensure smooth functioning of such systems.
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